先进半导体器件需要的高k栅介质金属栅结构的介绍
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Dielectric Films for Advanced Microelectronics Edited by Mikhail Baklanov IMEC Leuven Belgium Martin Green NIST Gaithersburg Maryland USA and Karen Maex IMEC Leuven Belgium Dielectric Films for Advanced Microelectronics Wiley Series in Materials for Electronic and Optoelectronic Applications Series Editors Dr Peter Capper SELEX Sensors and Airborne Systems Infrared Ltd Southampton UK Professor Safa Kasap University of Saskatchewan Canada Professor Arthur Willoughby University of Southampton S......
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