Dielectric Films for Advanced Microelectronics Edited by Mikhail Baklanov IMEC Leuven Belgium Martin Green NIST Gaithersburg Maryland USA and Karen Maex IMEC Leuven Belgium Dielectric Films for Advanced Microelectronics Wiley Series in Materials for Electronic and Optoelectronic Applications Series Editors Dr Peter Capper SELEX Sensors and Airborne Systems Infrared Ltd Southampton UK Professor Safa Kasap University of Saskatchewan Canada Professor Arthur Willoughby University of Southampton S......
Dielectric Films for
Advanced Microelectronics
Edited by
Mikhail Baklanov
IMEC, Leuven, Belgium
Martin Green
NIST, Gaithersburg, Maryland, USA
and
Karen Maex
IMEC, Leuven, Belgium
Dielectric Films for
Advanced Microelectronics
Wiley Series in Materials for Electronic and Optoelectronic
Applications
Series Editors
Dr Peter Capper, SELEX Sensors and Airborne Systems Infrared Ltd, Southampton, UK
Professor Safa Kasap, University of Saskatchewan, Canada
Professor Arthur Willoughby, University of Southampton, Southampton, UK
Published Titles
Bulk Crystal Growth of Electronic, Optical and Optoelectronic Materials,
Edited by P. Capper
Properties of Group-IV, III–V and II–VI Semiconductors, S. Adachi
Charge Transport in Disordered Solids with Applications in Electronics,
Edited by S. Baranovski
Optical Properties of Condensed Matter and Applications, Edited by J. Singh
Thin Film Solar Cells: Fabrication, Characterization and Applications,
Edited by J. Poortmans and V. Arkhipov
Forthcoming Titles
Liquid Phase Epitaxy of Electronic, Optical and Optoelectronic Materials,
Edited by P. Capper and M. Mauk
Molecular Electronics, M. Petty
Luminescent Materials and Applications, Edited by A. Kitai
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