介绍了对新型发光二极管外延片光致发光系统的改进，以VC.net 为语言工具编制软件，对发光二极管外延片关键性能参数的测量结果进行分析。增加了薄膜厚度测量的性能，完善了测量系统的功能。基于PC 的检测系统智能化、自动化，实现了对LED 外延片的无损、快速、准确的在线扫描测量。关键词：外延片检测；光致发光；白光干涉法PC-based LED Epi-wafers NDT scanning system Dong Zhanmin Li Shaolin Sun Hongsan (Department of Physics, Tsinghua University, Beijing 100084, China) Abstract: A new smart LED epi-wafers nondestructive scanning system that based on PC was introduced. Using software to analyze, the measurement results of epi-wafers’ key performance parameters could be got immediately. The function of film thickness measurement was added to the system. This PC-based intelligent system could realize LED wafer nondestructive, rapid and accurate on-line scanning.Key words: Epi-wafers test; Photoluminescence; White light interference
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