基于MEMS技术的气体传感器
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2008 27 11 Transducer and M icrosystem Technologies 5 MEMS 100084 MEMS FA IMS TP212 2 A 1000 9787 2008 11 0005 03 Ga s sen sor ba sed on M EM S technology L I Ke YU Shi jie YOU Zheng ZHAO J ia hao M icro Electro M echan ica l System s Research Labora tory D epartm en t of Prec ision In strum en ts and M echanology Tsinghua Un iversity Be ijing 100084 Ch ina Abstract The p rincip les of gas sensors based on MEMS technology at home and abroad are summarized which include resonate......
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