针对半导体扩散炉温度控制问题,提出采用RBF 神经网络控制方法。RBF 神经网络采用3-8-3 结构。建模表明,此RBF 网络数学模型具有良好的控制品质。关键词:半导体扩散炉;RBF 神经网络;PID 温度控制Study on Semiconductor Diffuse Furnace Temperature Control Mondeling Based on RBF NNCAI Bing1,2, HU Rong-yu1, Wang Pei-yuan1, LIU Chuan-qing1 (1.Department of Physics & Electronic Information Technology, XiangFan University , HuBeiXiangFan 441053, China; 2.Department of Control Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China) Abstract: According to the problem of temperature control of semiconductor diffuse furnace, an new control approach is described in the paper, such as RBF NN. the RBF NN construct is3-8-3,simulation results show that control method has high quality.Keywords: Semiconductor Diffuse Kiln; RBF NN; PIDTemperature Control
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