Along with the development of technology, semiconductor devices, such as IC and LED, have got wide applications in electronic industry. Semiconductor devices are ESD sensitive. ESD would sometimes cause breakdown and destroy the devices. ESD can also cause indiscoverable soft breakdown that is a hidden trouble and would affect the quality, usage life, reliability of the products and even the profit of company. Many manufacturers have paid dearly for that. Thereby ESD is also comparable to a `cryptomorphic killer\' in electronic industry. This paper introduces the mechanism, types, discharge models of ESD, experimental methods for ESD recommended by international standards and basic principles of ESD test instruments. It focuses on the ESD test methods and test systems for IC, LED and other semiconductor devices
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