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功率MOSFET的结构与特点

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功率MOSFET的结构与特点  功率MOSFET的结构与特点

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2010年4月1日
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【发行】瑞萨电子公司(
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功率MOS
FET
结构与特点
瑞萨科技功率
MOS FET
具有
D
系列 (垂直结构)和
S
系列 (水平结构)
。其结构分别如图
1
和图
2
所示。
两者在特性上稍有差别,½½拥有功率
MOS FET
在本质上的优良特性,具½内容如下:
·
·
·
无½½流子的积累现象,具有优良的频率特性和开关特性。
无电流集中,破坏耐量大。
为电压控制器件,驱动功率小。
N
+
P
N
+
P
N
+
1 D
系列 (垂直)的结构 (N 沟道)
N
+
N
N
+
P
P
+
2 S
系列 (水平)的结构 (N 沟道)
为了解功率
MOS FET
的结构及特性,下面介绍一下基本的
N
沟道
MOS FET
结构和工½。
N
沟道
MOS FET
的基本结构如图
3
所示。因为控制电流的栅电极被氧化膜包围,所以该结构称为
MOS
构。源极指的是带电粒子 (这里为电子)源,漏极指的是电子的排出口。
如果对栅电极½加正电压,栅极正下方的
P
层就会反½½成沟道,并且漏极电流由漏极流向源极,这就是
MOS FET
的工½方式 (P 沟道与之相反)
如果在漏极
/
源极之间½加电压,沟道内的电子就向漏极移动,并产生漏极电流。
在栅极电压为
0V
时,产生漏极电流的FET 称为耗½型 (常开型)
,不产生漏极电流的
FET称为增强型
(常关型)
。瑞萨科技功率
MOS FET
全部为增强型 (常开型)
将漏极电流产生时的栅极电压称为栅极截止电压
V
GS(off)
(图
4)
通常
I
DS
−V
GS
2
次相关关系。该曲线的斜度为相互电导
gm(=ΔI
DS
/ΔV
GS
),表示放大的尺寸。
RCJ27G0014-0100/Rev.1.00
February 2008
Page 1 of 6
功率
MOS FET
结构与特点
N
+
P
N
+
3 MOS FET
的基本结构 (N 沟道)
I
DS
Δl
DS
ΔV
GS
gm =
V
GS
0 V
GS (off)
Δl
DS
ΔV
GS
4
传输特性
漏极耐压由图
3
所示的漏极
N
+
区域和栅电极之间的结构决定。由于漏极
N
+
区域与栅电极的距离很近,中间
只隔着很薄的栅极氧化膜,这样会在两者之间产生强电场的集中,因此不½½成较强的漏极电压。普通
MOS
FET
的耐压值为
20
½
30V。
通过扩大该漏极
N
+
区域和栅电极的距离以缓和电场集中,可提高漏极耐压。此时,在漏极
N
+
区域和沟道
之间½成电流通路
N
层。
因此,高耐压
MOS FET可理解为在普通 MOS FET
的漏极端附加了电阻。
功率
MOS FET
为多个元件在内部并联的结构。
功率
MOS FET
的结构大致分为两种,一种称为
D
系列 (垂直结构)
,另一种称为
S
系列 (水平结构)其
结构如图
1
和图
2
所示。下面对各系列的结构及特点进行更详细的说明。
·
D系列
(垂直结构)
D
系列中漏极
N
+
区域½于硅电路板的下方。栅电极覆盖在沟道之间的整个
N
層上,以缓和栅极下方
的电场集中。
电子由源极水平穿过沟道到达
N
层。
此时,
栅电极的正电压在
N
层表面½成了
N
+
积累层,
电子在通过
N
+
积累层后,垂直穿过整个
N
层到达漏极。因此,将
D
系列称为垂直结构,并且外壳为漏
极。
由于保持漏极电压的部分(N 层)½于硅中,所以,D 系列的单个½积比
S
系列要小,并且,与相同电
压、相同芯片尺寸的
S
系列相比,
D
系列的通态电阻更小。
静电电容具有如图
5
所示的结电容和
MOS
电容。
因为栅极
/
漏极之间的电容
C
GD
比较大,因此不½½视
C
GD
对源极接地的输入电容
Ciss、输出电容 Coss
及反馈电容
Crss的½响。
Ciss=C
GS
+CGD
Coss=C
DS
+C
GD
Crss=C
GD
RCJ27G0014-0100/Rev.1.00
February 2008
Page 2 of 6
功率
MOS FET
结构与特点
Cgs
3
Cgs
1
N
+
P
Cds
1
N
+
Cgd
Cgs
2
N
+
P
Cds
2
R
DS
N
C
GS
=Cgs
1
+Cgs
2
+Cgs
3
C
DS
=Cds
1
+Cds
2
C
GD
=Cgd
5 D
系列 (垂直型)的结构 (N 沟道)
栅电极采用了在
CMOS LSI
中具有实际功效的多晶硅。多晶硅的电阻比铝或钼等金属材料高
100
倍左右,½
通过改进多晶硅栅与金属电极的连接后,降½了栅极电阻。在垂直结构中,因为反馈电容
Cgd
较大,并且漏极
电压的依存性较强,所以不½单纯由栅极电阻的时间常数来决定输入电容。这样,关于开关时间的工½分析变
得更为复杂。详细内容记½½于 《功率
MOS FET
½用时的注意事项》
·
S
系列 (水平结构)
S
系列中漏极
N
+
区域½于硅表面。在漏极
N
+
区域与沟道之间设½了
N
层,可½电场强度平均。而
且,½源电极扩展到了
N
层上面,可½为场板来防止栅极附近的电场集中。电子由源极水平穿过沟道
N
层到达漏极。因此,将
S
系列称为水平结构。为了½衬底保持一定的电½,将衬底连接到了源电
极,外壳为源极。
反馈电容
Crss
对应图
6
中的
Cgd。由于源极场板扩展到了 N
层上,因此可通过场板与
N
层的电容
Cds
屏½
Cgd,½得反馈电容 Crss的值非常小。
从芯片及封装两方面来看,
S
系列的结构适用于输入端与输出端分离的高频产品。
Cgs
N
+
Cgd Cds
R
DS
N
N
+
N
P
P
+
Csub
6 S系列
(水平型)的结构 (N 沟道)
RCJ27G0014-0100/Rev.1.00
February 2008
Page 3 of 6
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