ANALYSIS AND APPLICATION OF CAPACITIVE SENSOR 2003
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University of Kentucky Masters Theses University of Kentucky UKnowledge Graduate School 2003 ANALYSIS AND APPLICATION OF CAPACITIVE DISPLACEMENT SENSORS TO CURVED SURFACES Philip T Smith Jr University of Kentucky psmithengrukyedu Recommended Citation Smith Jr Philip T ANALYSIS AND APPLICATION OF CAPACITIVE DISPLACEMENT SENSORS TO CURVED SURFACES 2003 University of Kentucky Masters Theses Paper 311 httpuknowledgeukyedugradschooltheses311 This Thesis is brought to you for free and open access by t......
University of Kentucky
UKnowledge
University of Kentucky Master's Theses
Graduate School
2003
ANALYSIS AND APPLICATION OF
CAPACITIVE DISPLACEMENT SENSORS
TO CURVED SURFACES
Philip T. Smith Jr.
University of Kentucky,
psmith@engr.uky.edu
Recommended Citation
Smith Jr., Philip T., "ANALYSIS AND APPLICATION OF CAPACITIVE DISPLACEMENT SENSORS TO CURVED
SURFACES" (2003).
University of Kentucky Master's Theses.
Paper 311.
http://uknowledge.uky.edu/gradschool_theses/311
This Thesis is brought to you for free and open access by the Graduate School at UKnowledge. It has been accepted for inclusion in University of
Kentucky Master's Theses by an authorized administrator of UKnowledge. For more information, please contact
UKnowledge@lsv.uky.edu.
Abstract of Thesis
ANALYSIS AND
APPLICATION OF
CAPACITIVE DISPLACEMENT SENSORS TO
CURVED SURFACES
Capacitive displacement sensors have many applications where non-contact, high
precision measurement of a surface is required. Because of their non-contact nature they can
easily measure conductive surfaces that are flexible or otherwise unable to be measured using a
contact probe. Since the output of the capacitance gage is electrical, data points can be collected
quickly and averaged to improve statistics.
It is often necessary for capacitive displacement sensors to gage the distance from a
curved (non-flat) surface. Although displacements can easily be detected, the calibration of this
output can vary considerably from the flat case. Since a capacitance gage is typically factory-
calibrated against a flat reference, the experimental output contains errors in both gain and
linearity. A series of calibration corrections is calculated for rectifying this output.
Capacitance gages are also limited in their overall displacement travel. A support stage is
described that, along with control electronics, allow the properties of the capacitance gage to be
combined with an interferometer to overcome this displacement limitation. Finally, an
application is proposed that would make use of the capacitance sensor and support stage
assembly.
KEYWORDS: Capacitance gage, electric field, finite element analysis, gossamer mirror
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