根据驱动模态频率和检测模态的频率相互匹配, 用有限元法优化了振子框架式微机械陀螺的结构尺寸; 根据建立的陀螺振动的等效电路模型, 对检测振动的性能进行了模拟分析, 该模型为传感器与接口电路的整体模拟打下了基础。关键词: 微机械陀螺; 优化设计; 等效电路模型; 模拟Abstract: F irst acco rding to thematch ing of drivingmode frequency and detect ion mode frequency, the st ruc2 ture dimensions of the comb2gimbal m icromach ined gyro scope are op t im ized using a finite element method (FEM ). Then an equivalent circuit model of gyro scope’s o scillat ing p ropert ies is derived, w h ich is available in detect ion o scillat ing p ropert ies analysis and also enables the senso r simulat ion w ith the interfacing elect ron2ics.Key words: m icromach ined gyro scope; op t imum design; equivalent circuit model; simulat ion
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