提出利用混沌进行柔性测量的一种方法,该方法特别适用于微谐振传感器在感测压力、温度变化时存在信号较弱,需要提高其灵敏度和测试分辨力的场合。利用系统从混沌状态到大周期转变时所表现出的共振锁频性质,进行了微弱频率变化信号的仿真提取。仿真证明该方法能实现对不同频率变化准确度的柔性测量,文中还进一步分析了其理论基础,提出了驱动力等效性观点。并给出了实验仿真结果,表明该方法很有应用潜力。关键词:硅微谐振传感器; 混沌; 共振锁频; 柔性测量Abstract :Flexible measure method based on the resonant frequency2locking behavior of chaos is presented. The method especially fits for detection of weak signal needed to enhance its sensitivity and resolving power in micro resonant sensor which is used to percepted pressure’s and temprature’s varitation. The simulated extraction of weak frequency variation signal is carried out with the expressed Resonant frequency2locking property when sys2tem transits from chaotic to great periodic motion. It is verified to realize flexible measure at different frequency variation precision through simulation. The theory basis is further analyzed and the standpoint about equivalent driven force is presented.Key words :silicon2micro2resonant sensor ; chaos ; resonant frequency2locking ; flexible measure
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