微热板式气压传感器结构设计与热分析
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2 2 2 0598 05 2 Optics and Precision Engineering Vol 12 No 6 Dec 2004 12 2004 12 6 924X2004 06 1004 116024 105 Pa TP212 A 10 Design and thermal analysis of gas pressure sensor with micro hotplate ZHAN G Feng tian TAN G Zhen an GAO Ren jing J IN Ren cheng GUO Wen tai WAN G Hai xia Research Center of M icro system Technology Dalian U niversity of Technology Dalian 116024 Chi na Abstract Fabrication process and working principle of t hermal gas pressure sensors based ......
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