DescriptionThe Agilent10706B High Stability Plane Mirror Interferometer (see Figure7D-1) is an improved version of the Agilent10706A interferometer. It offers very high thermal stability. Its thermal drift is typically 1/12 that of a conventional plane mirror interferometer.The Agilent10706B High Stability Plane Mirror Interferometer uses plane mirror reflectors. For X-Y stage applications, the user must provide the mirror(s).
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